Bruker Silicon Ingot Analyzer, SiBrickScan (SBS),

SiBrickScan is a dedicated system that quantifies interstitial oxygen in entire silicon ingots using FT-IR, providing concentration profiles along the longitudinal direction. It significantly reduces costs by eliminating the need for wafer or test sample preparation.

• Quantify interstitial oxygen without preparing wafer samples: Measure grid oxygen without needing to prepare wafer samples
• High-precision quantification method aligned with ASTM/SEMI1188: Utilizes a high-precision quantification method directly linked to ASTM/SEMI1188 standards
• Unmatched detection sensitivity with SiBrickScan: Offers unmatched detection sensitivity through SiBrickScan technology
• Dedicated SiBrickScan versions for various ingot types: Provides specialized SiBrickScan versions tailored to different ingot types
• Industry-standard compatible, robust design: Ensures compatibility with industry standards and a robust, durable design
• Intuitive, user-friendly software interface: Features an intuitive and easy-to-use software interface
• Innovative, high-sensitivity optical design with internal reference samples: Boasts an innovative, high-sensitivity optical design with integrated reference samples
• Customizable detector options to meet customer needs: Offers customizable detector options to cater to specific customer requirements